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Precision Endpoint and Depth Measurement by SAMCO


3) Precision Depth Measurement and Endpoint Detection

Proprietary endpoint detection system allows accurate measurement of etch depth, or remaining film thickness over multiple runs even in production environments.
The example shows a 30nm AlGaN layer recessed to 3nm through the utilization of SAMCO’s precision end-point system.

System: SAMCO RIE-200iP