Cleaning Systems

UV-Ozone Cleaners

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Samco's line of UV-Ozone Cleaners utilize a combination of ultraviolet light, high concentration ozone and a heated stage to provide a completely dry and damage free cleaning process.

UV-1

UV-1

  • Compact bench-top system
  • Heated sample stage
  • Process up to 6" wafers
  • Low cost

Details

UV-2

UV-2

  • Compact bench-top system
  • Drawer loaded
  • Process up to 8" wafers
  • Heated sample stage

Details

UV-300

UV-300

  • Compact bench-top system
  • Process up to 12" wafers
  • Rotating and heated stage
  • Two ozone generators

Details

UV-300H

UV-300H

  • Process up to 300mm wafers
  • Heated sample stage
  • High-concentration ozone generators
  • Drawer loaded

Details

UV-300HC

UV-300HC

  • Cassette-to-cassette operation
  • Temperature control (Ambient to 300°C)
  • High-concentration ozone generators
  • Two cassettes with 12 trays/cassette

Details

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