Cleaning Systems

PC-5000

Plasma Dry Cleaning System
The Samco PC-5000 is a Plasma Dry Cleaning system designed for surface cleaning of glass and plastic substrates. This system can process up to 500x500mm substrates with excellent uniformity due to improved method of gas introduction to the chamber.

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  • Features
  • Applications
  • Can process substrates up to 500x500mm

  • Excellent uniformity is achieved with improved gas introduction to the process chamber

  • Surface cleaning of plastic packages

  • Surface cleaning of glass substrates

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