Etching Systems

RIE Systems

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Since our establishment in 1979 Samco has developed a wealth of dry etching expertise. Today our product line includes, open-load, load-lock, and cassette type systems for both R&D and Mass Production customers.

RIE-1C

RIE-1C

  • Bench-top RIE system
  • Process up to 4" wafers
  • Low cost of ownership
  • Failure analysis applications

Details

RIE-10NR

RIE-10NR

  • Process up to 8" wafers
  • Multi-step recipe storage
  • UL Certified

Details

RIE-200NL

RIE-200NL

  • Load-lock dry etching system
  • Processes up to 8" wafers
  • Small footprint
  • Multi-step recipe storage

Details

RIE-300NR

RIE-300NR

  • Fully automated control
  • Process up to 12" wafers
  • Multi-step recipe storage
  • SEMI-S2 Certified

Details

RIE-200C

RIE-200C

  • Process up to 8" wafers
  • Cassette-to-cassette type
  • Stainless steel chamber
  • Features a dual-arm robot

Details

RIE-200LC

RIE-200LC

  • Cassette-to-cassette system
  • Processes up to 8" wafers

Details

RIE-6000

RIE-6000

  • Large 600mm x 600mm sample stage
  • batch processing
  • 5kW RF generator
  • Up to 4 gas lines (MFC)

Details

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