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Organic EL processed by SAMCO PECVD (Plasma Enhanced CVD) System


Details:

Encapsulation SiN film deposition on a film. Multiple layers of tight SiN film from liquid precursor and flexible SiN film realize the thick film with little stress and no cracks, suitable for encapsulation.

Processed by SAMCO PD-270STP, SAMCO PD-220NL