Application

Photonic Crystal

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Manufacturing Process

GaAs Wafer

Photonic Crystals

AlGaAs Deposition

Photonic Crystals

GaAs Deposition

Photonic Crystals

Photolithography

Photonic Crystals

Dry Etching

RIE-400iP

Photonic Layer Hole Etching

Photonic Crystals

Dry Cleaning

UV-2
PC-300

Photo Resist Removal

Photonic Crystals

Air Bridge Formation
(Wet Etching)

Photonic Crystals

Photonic Crystal Light Wave Guide

Photonic Crystals

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