Application

RF Device

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Manufacturing Process

Compound Semiconductor Wafer

RF Devices

MOCVD

GaN Epitaxial Growth

RF Devices

Plasma CVD

PD-220LC

Mask formation for implanting

RF Devices

Photolithography

RF Devices

Dry Etching

RIE-200iPC

RIE-200LC

Mask Etching

RF Devices

Ion Implanting

RF Devices

Mask Removal

RF Devices

Photolithography

RF Devices

Dry Etching

RIE-200iPC

Recess Formation

RF Devices

Electrode Formation

RF Devices

Plasma CVD

PD-220LC

Protection Film Deposition

RF Devices

Photolithography

RF Devices

Dry Etching

RIE-200iPC

RIE-200LC

Contact Hole Etching

RF Devices

Glue Wafer on Support

RF Devices

Photolithography

RF Devices

Dry Etching

RIE-200iPC

Via Hole Formation

*Wafer Cooling Required

RF Devices

Dry Etching

RIE-200iPC

Plasma CVD

PD-220LC

Electrode Formation

RF Devices

Dry Cleaning

PC-1100

UV-300HC

Dicing and Packaging

RF Devices

RF Device for Mobile Phone

RF Devices

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