Application

Power Device

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Manufacturing Process

MOCVD

Epitaxial Growth

Power Devices

Plasma CVD

PD-220LC

PD-220NL

Mask Deposition

Power Devices

Photolithography

Power Devices

Dry Etching

RIE-600iPC

RIE-101iPH

SiO2 Etching

Power Devices

Ion implant & Annealing

Power Devices

Mask Removal

Power Devices

Plasma CVD

PD-220LC

PD-220NL

SiO2 Mask
Deposition

Power Devices

Photolithography

Power Devices

Dry Etching

RIE-600iPC

SiO2 Mask Etching

Power Devices

Dry Etching

RIE-600iPC

SiC Etching

Power Devices

SiO2 Mask Removal

Power Devices

Plasma CVD

PD-220LC

PD-220NL

SiO2 Film
Deposition

Power Devices

Photolithography

Power Devices

Dry Etching

RIE-200iPC

RIE-101iPH

SiO2 Etching

Power Devices

Electrode Formation

(Source / Gate / Drain)

Power Devices

Power Transistor

Power Devices

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