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Process Flow

Sapphire Wafer                

Wafer Cleaning

LED

Dry Etching

RIE-330iPC

Patterned Sapphire Substrate (PSS)

LED

MOCVD

GaN-500

p-GaN/Active/n-GaN Layer Deposition

LED

Photolithography

LED

Dry Etching

RIE-330iPC

Expose n-GaN Layer by Etching

LED

Electrode Formation

LED

Dry Etching

RIE-330iPC

Element Separation by Etching

LED

Plasma CVD

PD-3800L

Passivation Layer Deposition

LED

Photolithography

LED

Dry Etching

RIE-100iPC

Contact Hole
Etching

LED

Dicing

Dry Cleaning

PXA-100

Wire Bonding

LED

Dry Cleaning

PXA-100

Phosphor Coating Cleaning before Packaging

LED

LED

LED

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